7/17/2010	9:01:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2010	9:01:38 AM	Recipe started at 9:01 AM
7/17/2010	9:01:38 AM	H2 valve closed
7/17/2010	9:01:38 AM	BCl3 valve closed
7/17/2010	9:01:38 AM	PH3 valve closed
7/17/2010	9:01:38 AM	SiCl4 pre valve closed
7/17/2010	9:01:38 AM	SiCl4 post valve closed
7/17/2010	9:01:38 AM	Main Vac valve closed
7/17/2010	9:01:38 AM	Bypass valve closed
7/17/2010	9:01:38 AM	Bubbler valve closed
7/17/2010	9:01:38 AM	Helium valve opened
7/17/2010	9:01:38 AM	Helium MFC set to  500.000000
7/17/2010	9:01:38 AM	H2 MFC set to  0.000000
7/17/2010	9:01:38 AM	BCl3 MFC set to  0.000000
7/17/2010	9:01:38 AM	PHl3 MFC set to  0.000000
7/17/2010	9:01:38 AM	SiCl4 MFC set to  0.000000
7/17/2010	9:01:38 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	9:01:38 AM	Tube furnace set to 0
7/17/2010	9:02:57 AM	Helium valve closed
7/17/2010	9:02:57 AM	H2 valve closed
7/17/2010	9:02:57 AM	BCl3 valve closed
7/17/2010	9:02:57 AM	PH3 valve closed
7/17/2010	9:02:58 AM	SiCl4 pre valve closed
7/17/2010	9:02:58 AM	SiCl4 post valve closed
7/17/2010	9:02:58 AM	Main Vac valve closed
7/17/2010	9:02:58 AM	Bypass valve closed
7/17/2010	9:02:58 AM	Bubbler valve closed
7/17/2010	9:02:58 AM	Helium MFC set to  0.000000
7/17/2010	9:02:58 AM	H2 MFC set to  0.000000
7/17/2010	9:02:58 AM	BCl3 MFC set to  0.000000
7/17/2010	9:02:58 AM	PHl3 MFC set to  0.000000
7/17/2010	9:02:58 AM	SiCl4 MFC set to  0.000000
7/17/2010	9:02:58 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	9:02:58 AM	Tube furnace set to 0
7/17/2010	9:02:58 AM	Run finished at 9:02 AM
7/17/2010	9:02:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2010	9:09:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2010	9:09:05 AM	Recipe started at 9:09 AM
7/17/2010	9:09:05 AM	Helium valve closed
7/17/2010	9:09:05 AM	H2 valve closed
7/17/2010	9:09:05 AM	BCl3 valve closed
7/17/2010	9:09:05 AM	PH3 valve closed
7/17/2010	9:09:05 AM	SiCl4 pre valve closed
7/17/2010	9:09:05 AM	SiCl4 post valve closed
7/17/2010	9:09:05 AM	Main Vac valve closed
7/17/2010	9:09:05 AM	Bubbler valve closed
7/17/2010	9:09:05 AM	Bypass valve opened
7/17/2010	9:09:05 AM	Helium MFC set to  0.000000
7/17/2010	9:09:05 AM	H2 MFC set to  0.000000
7/17/2010	9:09:05 AM	BCl3 MFC set to  0.000000
7/17/2010	9:09:05 AM	PHl3 MFC set to  0.000000
7/17/2010	9:09:05 AM	SiCl4 MFC set to  0.000000
7/17/2010	9:09:05 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	9:09:05 AM	Tube furnace set to 0
7/17/2010	9:09:40 AM	Helium valve closed
7/17/2010	9:09:40 AM	H2 valve closed
7/17/2010	9:09:40 AM	BCl3 valve closed
7/17/2010	9:09:40 AM	PH3 valve closed
7/17/2010	9:09:40 AM	SiCl4 pre valve closed
7/17/2010	9:09:40 AM	SiCl4 post valve closed
7/17/2010	9:09:40 AM	Bubbler valve closed
7/17/2010	9:09:40 AM	Main Vac valve opened
7/17/2010	9:09:40 AM	Bypass valve opened
7/17/2010	9:09:40 AM	Helium MFC set to  0.000000
7/17/2010	9:09:40 AM	H2 MFC set to  0.000000
7/17/2010	9:09:40 AM	BCl3 MFC set to  0.000000
7/17/2010	9:09:40 AM	PHl3 MFC set to  0.000000
7/17/2010	9:09:40 AM	SiCl4 MFC set to  0.000000
7/17/2010	9:09:40 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	9:09:40 AM	Tube furnace set to 0
7/17/2010	9:09:40 AM	Run finished at 9:09 AM
7/17/2010	9:09:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2010	9:14:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2010	9:14:48 AM	Recipe started at 9:14 AM
7/17/2010	9:14:48 AM	H2 valve closed
7/17/2010	9:14:48 AM	BCl3 valve closed
7/17/2010	9:14:48 AM	PH3 valve closed
7/17/2010	9:14:48 AM	SiCl4 pre valve closed
7/17/2010	9:14:48 AM	SiCl4 post valve closed
7/17/2010	9:14:48 AM	Main Vac valve closed
7/17/2010	9:14:48 AM	Bypass valve closed
7/17/2010	9:14:48 AM	Bubbler valve closed
7/17/2010	9:14:48 AM	Helium valve opened
7/17/2010	9:14:48 AM	Helium MFC set to  500.000000
7/17/2010	9:14:48 AM	H2 MFC set to  0.000000
7/17/2010	9:14:48 AM	BCl3 MFC set to  0.000000
7/17/2010	9:14:48 AM	PHl3 MFC set to  0.000000
7/17/2010	9:14:48 AM	SiCl4 MFC set to  0.000000
7/17/2010	9:14:48 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	9:14:48 AM	Tube furnace set to 0
7/17/2010	9:16:09 AM	Helium valve closed
7/17/2010	9:16:09 AM	H2 valve closed
7/17/2010	9:16:09 AM	BCl3 valve closed
7/17/2010	9:16:09 AM	PH3 valve closed
7/17/2010	9:16:09 AM	SiCl4 pre valve closed
7/17/2010	9:16:09 AM	SiCl4 post valve closed
7/17/2010	9:16:09 AM	Main Vac valve closed
7/17/2010	9:16:09 AM	Bypass valve closed
7/17/2010	9:16:09 AM	Bubbler valve closed
7/17/2010	9:16:09 AM	Helium MFC set to  0.000000
7/17/2010	9:16:09 AM	H2 MFC set to  0.000000
7/17/2010	9:16:09 AM	BCl3 MFC set to  0.000000
7/17/2010	9:16:09 AM	PHl3 MFC set to  0.000000
7/17/2010	9:16:09 AM	SiCl4 MFC set to  0.000000
7/17/2010	9:16:09 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	9:16:09 AM	Tube furnace set to 0
7/17/2010	9:16:09 AM	Run finished at 9:16 AM
7/17/2010	9:16:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2010	9:18:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2010	9:18:26 AM	Recipe started at 9:18 AM
7/17/2010	9:18:26 AM	Helium valve closed
7/17/2010	9:18:26 AM	H2 valve closed
7/17/2010	9:18:26 AM	BCl3 valve closed
7/17/2010	9:18:26 AM	PH3 valve closed
7/17/2010	9:18:26 AM	SiCl4 pre valve closed
7/17/2010	9:18:26 AM	SiCl4 post valve closed
7/17/2010	9:18:26 AM	Main Vac valve closed
7/17/2010	9:18:26 AM	Bubbler valve closed
7/17/2010	9:18:26 AM	Bypass valve opened
7/17/2010	9:18:26 AM	Helium MFC set to  0.000000
7/17/2010	9:18:26 AM	H2 MFC set to  0.000000
7/17/2010	9:18:26 AM	BCl3 MFC set to  0.000000
7/17/2010	9:18:26 AM	PHl3 MFC set to  0.000000
7/17/2010	9:18:26 AM	SiCl4 MFC set to  0.000000
7/17/2010	9:18:26 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	9:18:26 AM	Tube furnace set to 0
7/17/2010	9:19:01 AM	Helium valve closed
7/17/2010	9:19:01 AM	H2 valve closed
7/17/2010	9:19:01 AM	BCl3 valve closed
7/17/2010	9:19:01 AM	PH3 valve closed
7/17/2010	9:19:01 AM	SiCl4 pre valve closed
7/17/2010	9:19:01 AM	SiCl4 post valve closed
7/17/2010	9:19:01 AM	Bubbler valve closed
7/17/2010	9:19:01 AM	Main Vac valve opened
7/17/2010	9:19:01 AM	Bypass valve opened
7/17/2010	9:19:01 AM	Helium MFC set to  0.000000
7/17/2010	9:19:01 AM	H2 MFC set to  0.000000
7/17/2010	9:19:01 AM	BCl3 MFC set to  0.000000
7/17/2010	9:19:01 AM	PHl3 MFC set to  0.000000
7/17/2010	9:19:01 AM	SiCl4 MFC set to  0.000000
7/17/2010	9:19:01 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	9:19:01 AM	Tube furnace set to 0
7/17/2010	9:19:01 AM	Run finished at 9:19 AM
7/17/2010	9:19:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2010	9:19:19 AM	Helium MFC set to  50.000000
7/17/2010	9:19:20 AM	Helium valve opened
7/17/2010	9:25:58 AM	Helium valve closed
7/17/2010	9:27:09 AM	Helium MFC set to  75.000000
7/17/2010	9:27:10 AM	Helium valve opened
7/17/2010	9:34:14 AM	Helium valve closed
7/17/2010	9:40:23 AM	Helium valve opened
7/17/2010	9:50:54 AM	Helium valve closed
7/17/2010	9:52:42 AM	Recipe started at 9:52 AM
7/17/2010	9:52:42 AM	Helium valve closed
7/17/2010	9:52:42 AM	BCl3 valve closed
7/17/2010	9:52:42 AM	PH3 valve closed
7/17/2010	9:52:42 AM	SiCl4 pre valve closed
7/17/2010	9:52:42 AM	SiCl4 post valve closed
7/17/2010	9:52:42 AM	Main Vac valve closed
7/17/2010	9:52:42 AM	Bypass valve closed
7/17/2010	9:52:42 AM	Bubbler valve closed
7/17/2010	9:52:42 AM	H2 valve opened
7/17/2010	9:52:42 AM	Helium MFC set to  0.000000
7/17/2010	9:52:42 AM	H2 MFC set to  500.000000
7/17/2010	9:52:42 AM	BCl3 MFC set to  0.000000
7/17/2010	9:52:42 AM	PHl3 MFC set to  0.000000
7/17/2010	9:52:42 AM	SiCl4 MFC set to  0.000000
7/17/2010	9:52:42 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	9:52:42 AM	Tube furnace set to 0
7/17/2010	9:54:06 AM	Helium valve closed
7/17/2010	9:54:06 AM	BCl3 valve closed
7/17/2010	9:54:06 AM	PH3 valve closed
7/17/2010	9:54:06 AM	SiCl4 pre valve closed
7/17/2010	9:54:06 AM	SiCl4 post valve closed
7/17/2010	9:54:06 AM	Main Vac valve closed
7/17/2010	9:54:06 AM	Bypass valve closed
7/17/2010	9:54:06 AM	H2 valve opened
7/17/2010	9:54:06 AM	Bubbler valve opened
7/17/2010	9:54:06 AM	Helium MFC set to  0.000000
7/17/2010	9:54:06 AM	H2 MFC set to  500.000000
7/17/2010	9:54:06 AM	BCl3 MFC set to  0.000000
7/17/2010	9:54:06 AM	PHl3 MFC set to  0.000000
7/17/2010	9:54:06 AM	SiCl4 MFC set to  0.000000
7/17/2010	9:54:06 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	9:54:06 AM	Tube furnace set to 1000
7/17/2010	10:14:06 AM	Helium valve closed
7/17/2010	10:14:06 AM	BCl3 valve closed
7/17/2010	10:14:06 AM	PH3 valve closed
7/17/2010	10:14:06 AM	Main Vac valve closed
7/17/2010	10:14:06 AM	Bypass valve closed
7/17/2010	10:14:06 AM	H2 valve opened
7/17/2010	10:14:06 AM	SiCl4 pre valve opened
7/17/2010	10:14:06 AM	SiCl4 post valve opened
7/17/2010	10:14:06 AM	Bubbler valve opened
7/17/2010	10:14:06 AM	Helium MFC set to  0.000000
7/17/2010	10:14:06 AM	H2 MFC set to  500.000000
7/17/2010	10:14:06 AM	BCl3 MFC set to  0.000000
7/17/2010	10:14:06 AM	PHl3 MFC set to  0.000000
7/17/2010	10:14:06 AM	SiCl4 MFC set to  50.000000
7/17/2010	10:14:06 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	10:14:06 AM	Tube furnace set to 1000
7/17/2010	10:34:06 AM	H2 valve closed
7/17/2010	10:34:06 AM	BCl3 valve closed
7/17/2010	10:34:06 AM	PH3 valve closed
7/17/2010	10:34:06 AM	SiCl4 pre valve closed
7/17/2010	10:34:06 AM	SiCl4 post valve closed
7/17/2010	10:34:06 AM	Main Vac valve closed
7/17/2010	10:34:06 AM	Bypass valve closed
7/17/2010	10:34:06 AM	Helium valve opened
7/17/2010	10:34:06 AM	Bubbler valve opened
7/17/2010	10:34:06 AM	Helium MFC set to  500.000000
7/17/2010	10:34:06 AM	H2 MFC set to  0.000000
7/17/2010	10:34:06 AM	BCl3 MFC set to  0.000000
7/17/2010	10:34:06 AM	PHl3 MFC set to  0.000000
7/17/2010	10:34:06 AM	SiCl4 MFC set to  0.000000
7/17/2010	10:34:06 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	10:34:06 AM	Tube furnace set to 0
7/17/2010	11:07:26 AM	Helium valve closed
7/17/2010	11:07:26 AM	H2 valve closed
7/17/2010	11:07:26 AM	BCl3 valve closed
7/17/2010	11:07:26 AM	PH3 valve closed
7/17/2010	11:07:26 AM	SiCl4 pre valve closed
7/17/2010	11:07:26 AM	SiCl4 post valve closed
7/17/2010	11:07:26 AM	Main Vac valve closed
7/17/2010	11:07:26 AM	Bypass valve closed
7/17/2010	11:07:26 AM	Bubbler valve closed
7/17/2010	11:07:26 AM	Helium MFC set to  0.000000
7/17/2010	11:07:26 AM	H2 MFC set to  0.000000
7/17/2010	11:07:26 AM	BCl3 MFC set to  0.000000
7/17/2010	11:07:26 AM	PHl3 MFC set to  0.000000
7/17/2010	11:07:26 AM	SiCl4 MFC set to  0.000000
7/17/2010	11:07:26 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	11:07:26 AM	Tube furnace set to 0
7/17/2010	11:07:27 AM	Run finished at 11:07 AM
7/17/2010	11:41:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2010	11:41:12 AM	Recipe started at 11:41 AM
7/17/2010	11:41:12 AM	Helium valve closed
7/17/2010	11:41:12 AM	H2 valve closed
7/17/2010	11:41:12 AM	BCl3 valve closed
7/17/2010	11:41:12 AM	PH3 valve closed
7/17/2010	11:41:12 AM	SiCl4 pre valve closed
7/17/2010	11:41:12 AM	SiCl4 post valve closed
7/17/2010	11:41:12 AM	Main Vac valve closed
7/17/2010	11:41:12 AM	Bubbler valve closed
7/17/2010	11:41:12 AM	Bypass valve opened
7/17/2010	11:41:12 AM	Helium MFC set to  0.000000
7/17/2010	11:41:12 AM	H2 MFC set to  0.000000
7/17/2010	11:41:12 AM	BCl3 MFC set to  0.000000
7/17/2010	11:41:12 AM	PHl3 MFC set to  0.000000
7/17/2010	11:41:12 AM	SiCl4 MFC set to  0.000000
7/17/2010	11:41:12 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	11:41:12 AM	Tube furnace set to 0
7/17/2010	11:41:48 AM	Helium valve closed
7/17/2010	11:41:48 AM	H2 valve closed
7/17/2010	11:41:48 AM	BCl3 valve closed
7/17/2010	11:41:48 AM	PH3 valve closed
7/17/2010	11:41:48 AM	SiCl4 pre valve closed
7/17/2010	11:41:48 AM	SiCl4 post valve closed
7/17/2010	11:41:48 AM	Bubbler valve closed
7/17/2010	11:41:48 AM	Main Vac valve opened
7/17/2010	11:41:48 AM	Bypass valve opened
7/17/2010	11:41:48 AM	Helium MFC set to  0.000000
7/17/2010	11:41:48 AM	H2 MFC set to  0.000000
7/17/2010	11:41:48 AM	BCl3 MFC set to  0.000000
7/17/2010	11:41:48 AM	PHl3 MFC set to  0.000000
7/17/2010	11:41:48 AM	SiCl4 MFC set to  0.000000
7/17/2010	11:41:48 AM	Bypass solenoid MFC set to  0.000000
7/17/2010	11:41:49 AM	Tube furnace set to 0
7/17/2010	11:41:49 AM	Run finished at 11:41 AM
7/17/2010	11:41:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2010	11:42:38 AM	Helium MFC set to  75.000000
7/17/2010	11:42:38 AM	Helium valve opened
7/17/2010	11:55:57 AM	Helium valve closed
7/17/2010	11:57:41 AM	Helium valve opened
7/17/2010	12:04:59 PM	Helium valve closed
7/17/2010	12:05:46 PM	Recipe started at 12:05 PM
7/17/2010	12:05:46 PM	Helium valve closed
7/17/2010	12:05:46 PM	BCl3 valve closed
7/17/2010	12:05:46 PM	PH3 valve closed
7/17/2010	12:05:46 PM	SiCl4 pre valve closed
7/17/2010	12:05:46 PM	SiCl4 post valve closed
7/17/2010	12:05:46 PM	Main Vac valve closed
7/17/2010	12:05:46 PM	Bypass valve closed
7/17/2010	12:05:46 PM	Bubbler valve closed
7/17/2010	12:05:46 PM	H2 valve opened
7/17/2010	12:05:46 PM	Helium MFC set to  0.000000
7/17/2010	12:05:46 PM	H2 MFC set to  500.000000
7/17/2010	12:05:46 PM	BCl3 MFC set to  0.000000
7/17/2010	12:05:46 PM	PHl3 MFC set to  0.000000
7/17/2010	12:05:46 PM	SiCl4 MFC set to  0.000000
7/17/2010	12:05:46 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	12:05:46 PM	Tube furnace set to 0
7/17/2010	12:07:07 PM	Helium valve closed
7/17/2010	12:07:07 PM	BCl3 valve closed
7/17/2010	12:07:07 PM	PH3 valve closed
7/17/2010	12:07:07 PM	SiCl4 pre valve closed
7/17/2010	12:07:07 PM	SiCl4 post valve closed
7/17/2010	12:07:07 PM	Main Vac valve closed
7/17/2010	12:07:07 PM	Bypass valve closed
7/17/2010	12:07:07 PM	H2 valve opened
7/17/2010	12:07:07 PM	Bubbler valve opened
7/17/2010	12:07:07 PM	Helium MFC set to  0.000000
7/17/2010	12:07:07 PM	H2 MFC set to  500.000000
7/17/2010	12:07:07 PM	BCl3 MFC set to  0.000000
7/17/2010	12:07:07 PM	PHl3 MFC set to  0.000000
7/17/2010	12:07:07 PM	SiCl4 MFC set to  0.000000
7/17/2010	12:07:07 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	12:07:08 PM	Tube furnace set to 1000
7/17/2010	12:27:08 PM	Helium valve closed
7/17/2010	12:27:08 PM	BCl3 valve closed
7/17/2010	12:27:08 PM	PH3 valve closed
7/17/2010	12:27:08 PM	Main Vac valve closed
7/17/2010	12:27:08 PM	Bypass valve closed
7/17/2010	12:27:08 PM	H2 valve opened
7/17/2010	12:27:08 PM	SiCl4 pre valve opened
7/17/2010	12:27:08 PM	SiCl4 post valve opened
7/17/2010	12:27:08 PM	Bubbler valve opened
7/17/2010	12:27:08 PM	Helium MFC set to  0.000000
7/17/2010	12:27:08 PM	H2 MFC set to  500.000000
7/17/2010	12:27:08 PM	BCl3 MFC set to  0.000000
7/17/2010	12:27:08 PM	PHl3 MFC set to  0.000000
7/17/2010	12:27:08 PM	SiCl4 MFC set to  65.000000
7/17/2010	12:27:08 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	12:27:08 PM	Tube furnace set to 1000
7/17/2010	12:47:08 PM	H2 valve closed
7/17/2010	12:47:08 PM	BCl3 valve closed
7/17/2010	12:47:08 PM	PH3 valve closed
7/17/2010	12:47:08 PM	SiCl4 pre valve closed
7/17/2010	12:47:08 PM	SiCl4 post valve closed
7/17/2010	12:47:08 PM	Main Vac valve closed
7/17/2010	12:47:08 PM	Bypass valve closed
7/17/2010	12:47:08 PM	Helium valve opened
7/17/2010	12:47:08 PM	Bubbler valve opened
7/17/2010	12:47:08 PM	Helium MFC set to  500.000000
7/17/2010	12:47:08 PM	H2 MFC set to  0.000000
7/17/2010	12:47:08 PM	BCl3 MFC set to  0.000000
7/17/2010	12:47:08 PM	PHl3 MFC set to  0.000000
7/17/2010	12:47:08 PM	SiCl4 MFC set to  0.000000
7/17/2010	12:47:08 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	12:47:08 PM	Tube furnace set to 0
7/17/2010	1:16:41 PM	Helium valve closed
7/17/2010	1:16:41 PM	H2 valve closed
7/17/2010	1:16:41 PM	BCl3 valve closed
7/17/2010	1:16:41 PM	PH3 valve closed
7/17/2010	1:16:41 PM	SiCl4 pre valve closed
7/17/2010	1:16:41 PM	SiCl4 post valve closed
7/17/2010	1:16:41 PM	Main Vac valve closed
7/17/2010	1:16:41 PM	Bypass valve closed
7/17/2010	1:16:41 PM	Bubbler valve closed
7/17/2010	1:16:41 PM	Helium MFC set to  0.000000
7/17/2010	1:16:41 PM	H2 MFC set to  0.000000
7/17/2010	1:16:41 PM	BCl3 MFC set to  0.000000
7/17/2010	1:16:41 PM	PHl3 MFC set to  0.000000
7/17/2010	1:16:41 PM	SiCl4 MFC set to  0.000000
7/17/2010	1:16:41 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	1:16:41 PM	Tube furnace set to 0
7/17/2010	1:16:42 PM	Run finished at 1:16 PM
7/17/2010	1:22:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2010	1:22:57 PM	Recipe started at 1:22 PM
7/17/2010	1:22:57 PM	Helium valve closed
7/17/2010	1:22:57 PM	H2 valve closed
7/17/2010	1:22:57 PM	BCl3 valve closed
7/17/2010	1:22:57 PM	PH3 valve closed
7/17/2010	1:22:57 PM	SiCl4 pre valve closed
7/17/2010	1:22:57 PM	SiCl4 post valve closed
7/17/2010	1:22:57 PM	Main Vac valve closed
7/17/2010	1:22:57 PM	Bubbler valve closed
7/17/2010	1:22:57 PM	Bypass valve opened
7/17/2010	1:22:57 PM	Helium MFC set to  0.000000
7/17/2010	1:22:57 PM	H2 MFC set to  0.000000
7/17/2010	1:22:57 PM	BCl3 MFC set to  0.000000
7/17/2010	1:22:57 PM	PHl3 MFC set to  0.000000
7/17/2010	1:22:57 PM	SiCl4 MFC set to  0.000000
7/17/2010	1:22:57 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	1:22:57 PM	Tube furnace set to 0
7/17/2010	1:23:33 PM	Helium valve closed
7/17/2010	1:23:33 PM	H2 valve closed
7/17/2010	1:23:33 PM	BCl3 valve closed
7/17/2010	1:23:33 PM	PH3 valve closed
7/17/2010	1:23:33 PM	SiCl4 pre valve closed
7/17/2010	1:23:33 PM	SiCl4 post valve closed
7/17/2010	1:23:33 PM	Bubbler valve closed
7/17/2010	1:23:33 PM	Main Vac valve opened
7/17/2010	1:23:33 PM	Bypass valve opened
7/17/2010	1:23:33 PM	Helium MFC set to  0.000000
7/17/2010	1:23:33 PM	H2 MFC set to  0.000000
7/17/2010	1:23:33 PM	BCl3 MFC set to  0.000000
7/17/2010	1:23:33 PM	PHl3 MFC set to  0.000000
7/17/2010	1:23:33 PM	SiCl4 MFC set to  0.000000
7/17/2010	1:23:33 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	1:23:34 PM	Tube furnace set to 0
7/17/2010	1:23:34 PM	Run finished at 1:23 PM
7/17/2010	1:23:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2010	1:25:44 PM	Helium MFC set to  75.000000
7/17/2010	1:25:45 PM	Helium valve opened
7/17/2010	1:39:32 PM	Helium valve closed
7/17/2010	1:42:08 PM	Recipe started at 1:42 PM
7/17/2010	1:42:08 PM	Helium valve closed
7/17/2010	1:42:08 PM	BCl3 valve closed
7/17/2010	1:42:08 PM	PH3 valve closed
7/17/2010	1:42:08 PM	SiCl4 pre valve closed
7/17/2010	1:42:08 PM	SiCl4 post valve closed
7/17/2010	1:42:08 PM	Main Vac valve closed
7/17/2010	1:42:08 PM	Bypass valve closed
7/17/2010	1:42:08 PM	Bubbler valve closed
7/17/2010	1:42:08 PM	H2 valve opened
7/17/2010	1:42:08 PM	Helium MFC set to  0.000000
7/17/2010	1:42:08 PM	H2 MFC set to  500.000000
7/17/2010	1:42:08 PM	BCl3 MFC set to  0.000000
7/17/2010	1:42:08 PM	PHl3 MFC set to  0.000000
7/17/2010	1:42:08 PM	SiCl4 MFC set to  0.000000
7/17/2010	1:42:08 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	1:42:08 PM	Tube furnace set to 0
7/17/2010	1:43:30 PM	Helium valve closed
7/17/2010	1:43:30 PM	BCl3 valve closed
7/17/2010	1:43:30 PM	PH3 valve closed
7/17/2010	1:43:30 PM	SiCl4 pre valve closed
7/17/2010	1:43:30 PM	SiCl4 post valve closed
7/17/2010	1:43:30 PM	Main Vac valve closed
7/17/2010	1:43:30 PM	Bypass valve closed
7/17/2010	1:43:30 PM	H2 valve opened
7/17/2010	1:43:30 PM	Bubbler valve opened
7/17/2010	1:43:30 PM	Helium MFC set to  0.000000
7/17/2010	1:43:30 PM	H2 MFC set to  500.000000
7/17/2010	1:43:30 PM	BCl3 MFC set to  0.000000
7/17/2010	1:43:30 PM	PHl3 MFC set to  0.000000
7/17/2010	1:43:30 PM	SiCl4 MFC set to  0.000000
7/17/2010	1:43:30 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	1:43:30 PM	Tube furnace set to 1000
7/17/2010	2:03:30 PM	Helium valve closed
7/17/2010	2:03:30 PM	BCl3 valve closed
7/17/2010	2:03:30 PM	PH3 valve closed
7/17/2010	2:03:30 PM	Main Vac valve closed
7/17/2010	2:03:30 PM	Bypass valve closed
7/17/2010	2:03:30 PM	H2 valve opened
7/17/2010	2:03:30 PM	SiCl4 pre valve opened
7/17/2010	2:03:30 PM	SiCl4 post valve opened
7/17/2010	2:03:30 PM	Bubbler valve opened
7/17/2010	2:03:30 PM	Helium MFC set to  0.000000
7/17/2010	2:03:30 PM	H2 MFC set to  500.000000
7/17/2010	2:03:30 PM	BCl3 MFC set to  0.000000
7/17/2010	2:03:30 PM	PHl3 MFC set to  0.000000
7/17/2010	2:03:30 PM	SiCl4 MFC set to  35.000000
7/17/2010	2:03:30 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	2:03:30 PM	Tube furnace set to 1000
7/17/2010	2:23:30 PM	H2 valve closed
7/17/2010	2:23:30 PM	BCl3 valve closed
7/17/2010	2:23:30 PM	PH3 valve closed
7/17/2010	2:23:30 PM	SiCl4 pre valve closed
7/17/2010	2:23:30 PM	SiCl4 post valve closed
7/17/2010	2:23:30 PM	Main Vac valve closed
7/17/2010	2:23:30 PM	Bypass valve closed
7/17/2010	2:23:30 PM	Helium valve opened
7/17/2010	2:23:30 PM	Bubbler valve opened
7/17/2010	2:23:30 PM	Helium MFC set to  500.000000
7/17/2010	2:23:30 PM	H2 MFC set to  0.000000
7/17/2010	2:23:30 PM	BCl3 MFC set to  0.000000
7/17/2010	2:23:30 PM	PHl3 MFC set to  0.000000
7/17/2010	2:23:30 PM	SiCl4 MFC set to  0.000000
7/17/2010	2:23:30 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	2:23:30 PM	Tube furnace set to 0
7/17/2010	2:56:50 PM	Helium valve closed
7/17/2010	2:56:50 PM	H2 valve closed
7/17/2010	2:56:50 PM	BCl3 valve closed
7/17/2010	2:56:50 PM	PH3 valve closed
7/17/2010	2:56:50 PM	SiCl4 pre valve closed
7/17/2010	2:56:50 PM	SiCl4 post valve closed
7/17/2010	2:56:50 PM	Main Vac valve closed
7/17/2010	2:56:50 PM	Bypass valve closed
7/17/2010	2:56:50 PM	Bubbler valve closed
7/17/2010	2:56:50 PM	Helium MFC set to  0.000000
7/17/2010	2:56:50 PM	H2 MFC set to  0.000000
7/17/2010	2:56:50 PM	BCl3 MFC set to  0.000000
7/17/2010	2:56:50 PM	PHl3 MFC set to  0.000000
7/17/2010	2:56:50 PM	SiCl4 MFC set to  0.000000
7/17/2010	2:56:50 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	2:56:51 PM	Tube furnace set to 0
7/17/2010	2:56:51 PM	Run finished at 2:56 PM
7/17/2010	3:08:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2010	3:08:44 PM	Recipe started at 3:08 PM
7/17/2010	3:08:44 PM	H2 valve closed
7/17/2010	3:08:44 PM	BCl3 valve closed
7/17/2010	3:08:44 PM	PH3 valve closed
7/17/2010	3:08:44 PM	SiCl4 pre valve closed
7/17/2010	3:08:44 PM	SiCl4 post valve closed
7/17/2010	3:08:44 PM	Main Vac valve closed
7/17/2010	3:08:44 PM	Bypass valve closed
7/17/2010	3:08:44 PM	Bubbler valve closed
7/17/2010	3:08:44 PM	Helium valve opened
7/17/2010	3:08:44 PM	Helium MFC set to  500.000000
7/17/2010	3:08:44 PM	H2 MFC set to  0.000000
7/17/2010	3:08:44 PM	BCl3 MFC set to  0.000000
7/17/2010	3:08:44 PM	PHl3 MFC set to  0.000000
7/17/2010	3:08:44 PM	SiCl4 MFC set to  0.000000
7/17/2010	3:08:44 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	3:08:44 PM	Tube furnace set to 0
7/17/2010	3:08:44 PM	Helium valve closed
7/17/2010	3:08:44 PM	H2 valve closed
7/17/2010	3:08:44 PM	BCl3 valve closed
7/17/2010	3:08:44 PM	PH3 valve closed
7/17/2010	3:08:44 PM	SiCl4 pre valve closed
7/17/2010	3:08:44 PM	SiCl4 post valve closed
7/17/2010	3:08:44 PM	Main Vac valve closed
7/17/2010	3:08:44 PM	Bypass valve closed
7/17/2010	3:08:44 PM	Bubbler valve closed
7/17/2010	3:08:44 PM	Helium MFC set to  0.000000
7/17/2010	3:08:44 PM	H2 MFC set to  0.000000
7/17/2010	3:08:44 PM	BCl3 MFC set to  0.000000
7/17/2010	3:08:44 PM	PHl3 MFC set to  0.000000
7/17/2010	3:08:44 PM	SiCl4 MFC set to  0.000000
7/17/2010	3:08:44 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	3:08:44 PM	Tube furnace set to 0
7/17/2010	3:08:45 PM	Run finished at 3:08 PM
7/17/2010	3:08:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/17/2010	3:13:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2010	3:13:47 PM	Recipe started at 3:13 PM
7/17/2010	3:13:47 PM	Helium valve closed
7/17/2010	3:13:47 PM	H2 valve closed
7/17/2010	3:13:47 PM	BCl3 valve closed
7/17/2010	3:13:47 PM	PH3 valve closed
7/17/2010	3:13:47 PM	SiCl4 pre valve closed
7/17/2010	3:13:47 PM	SiCl4 post valve closed
7/17/2010	3:13:47 PM	Main Vac valve closed
7/17/2010	3:13:47 PM	Bubbler valve closed
7/17/2010	3:13:47 PM	Bypass valve opened
7/17/2010	3:13:47 PM	Helium MFC set to  0.000000
7/17/2010	3:13:47 PM	H2 MFC set to  0.000000
7/17/2010	3:13:47 PM	BCl3 MFC set to  0.000000
7/17/2010	3:13:47 PM	PHl3 MFC set to  0.000000
7/17/2010	3:13:47 PM	SiCl4 MFC set to  0.000000
7/17/2010	3:13:47 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	3:13:47 PM	Tube furnace set to 0
7/17/2010	3:14:24 PM	Helium valve closed
7/17/2010	3:14:24 PM	H2 valve closed
7/17/2010	3:14:24 PM	BCl3 valve closed
7/17/2010	3:14:24 PM	PH3 valve closed
7/17/2010	3:14:24 PM	SiCl4 pre valve closed
7/17/2010	3:14:24 PM	SiCl4 post valve closed
7/17/2010	3:14:24 PM	Bubbler valve closed
7/17/2010	3:14:24 PM	Main Vac valve opened
7/17/2010	3:14:24 PM	Bypass valve opened
7/17/2010	3:14:24 PM	Helium MFC set to  0.000000
7/17/2010	3:14:24 PM	H2 MFC set to  0.000000
7/17/2010	3:14:24 PM	BCl3 MFC set to  0.000000
7/17/2010	3:14:24 PM	PHl3 MFC set to  0.000000
7/17/2010	3:14:24 PM	SiCl4 MFC set to  0.000000
7/17/2010	3:14:24 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	3:14:24 PM	Tube furnace set to 0
7/17/2010	3:14:24 PM	Run finished at 3:14 PM
7/17/2010	3:14:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2010	3:21:20 PM	Helium MFC set to  100.000000
7/17/2010	3:21:21 PM	Helium valve opened
7/17/2010	3:29:10 PM	Helium valve closed
7/17/2010	3:29:35 PM	Helium valve opened
7/17/2010	3:36:13 PM	Helium valve closed
7/17/2010	3:37:07 PM	Recipe started at 3:37 PM
7/17/2010	3:37:07 PM	Helium valve closed
7/17/2010	3:37:07 PM	BCl3 valve closed
7/17/2010	3:37:07 PM	PH3 valve closed
7/17/2010	3:37:07 PM	SiCl4 pre valve closed
7/17/2010	3:37:07 PM	SiCl4 post valve closed
7/17/2010	3:37:07 PM	Main Vac valve closed
7/17/2010	3:37:07 PM	Bypass valve closed
7/17/2010	3:37:07 PM	Bubbler valve closed
7/17/2010	3:37:07 PM	H2 valve opened
7/17/2010	3:37:07 PM	Helium MFC set to  0.000000
7/17/2010	3:37:07 PM	H2 MFC set to  500.000000
7/17/2010	3:37:07 PM	BCl3 MFC set to  0.000000
7/17/2010	3:37:07 PM	PHl3 MFC set to  0.000000
7/17/2010	3:37:07 PM	SiCl4 MFC set to  0.000000
7/17/2010	3:37:07 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	3:37:07 PM	Tube furnace set to 0
7/17/2010	3:38:29 PM	Helium valve closed
7/17/2010	3:38:29 PM	BCl3 valve closed
7/17/2010	3:38:29 PM	PH3 valve closed
7/17/2010	3:38:29 PM	SiCl4 pre valve closed
7/17/2010	3:38:29 PM	SiCl4 post valve closed
7/17/2010	3:38:29 PM	Main Vac valve closed
7/17/2010	3:38:29 PM	Bypass valve closed
7/17/2010	3:38:29 PM	H2 valve opened
7/17/2010	3:38:29 PM	Bubbler valve opened
7/17/2010	3:38:29 PM	Helium MFC set to  0.000000
7/17/2010	3:38:29 PM	H2 MFC set to  500.000000
7/17/2010	3:38:29 PM	BCl3 MFC set to  0.000000
7/17/2010	3:38:29 PM	PHl3 MFC set to  0.000000
7/17/2010	3:38:29 PM	SiCl4 MFC set to  0.000000
7/17/2010	3:38:29 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	3:38:29 PM	Tube furnace set to 1000
7/17/2010	3:58:29 PM	Helium valve closed
7/17/2010	3:58:29 PM	BCl3 valve closed
7/17/2010	3:58:29 PM	PH3 valve closed
7/17/2010	3:58:29 PM	Main Vac valve closed
7/17/2010	3:58:29 PM	Bypass valve closed
7/17/2010	3:58:29 PM	H2 valve opened
7/17/2010	3:58:29 PM	SiCl4 pre valve opened
7/17/2010	3:58:29 PM	SiCl4 post valve opened
7/17/2010	3:58:29 PM	Bubbler valve opened
7/17/2010	3:58:29 PM	Helium MFC set to  0.000000
7/17/2010	3:58:29 PM	H2 MFC set to  500.000000
7/17/2010	3:58:29 PM	BCl3 MFC set to  0.000000
7/17/2010	3:58:29 PM	PHl3 MFC set to  0.000000
7/17/2010	3:58:29 PM	SiCl4 MFC set to  60.000000
7/17/2010	3:58:29 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	3:58:29 PM	Tube furnace set to 1000
7/17/2010	4:18:29 PM	H2 valve closed
7/17/2010	4:18:29 PM	BCl3 valve closed
7/17/2010	4:18:29 PM	PH3 valve closed
7/17/2010	4:18:29 PM	SiCl4 pre valve closed
7/17/2010	4:18:29 PM	SiCl4 post valve closed
7/17/2010	4:18:29 PM	Main Vac valve closed
7/17/2010	4:18:29 PM	Bypass valve closed
7/17/2010	4:18:29 PM	Helium valve opened
7/17/2010	4:18:29 PM	Bubbler valve opened
7/17/2010	4:18:29 PM	Helium MFC set to  500.000000
7/17/2010	4:18:29 PM	H2 MFC set to  0.000000
7/17/2010	4:18:29 PM	BCl3 MFC set to  0.000000
7/17/2010	4:18:29 PM	PHl3 MFC set to  0.000000
7/17/2010	4:18:29 PM	SiCl4 MFC set to  0.000000
7/17/2010	4:18:29 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	4:18:29 PM	Tube furnace set to 0
7/17/2010	4:41:18 PM	Helium valve closed
7/17/2010	4:41:18 PM	H2 valve closed
7/17/2010	4:41:18 PM	BCl3 valve closed
7/17/2010	4:41:18 PM	PH3 valve closed
7/17/2010	4:41:18 PM	SiCl4 pre valve closed
7/17/2010	4:41:18 PM	SiCl4 post valve closed
7/17/2010	4:41:18 PM	Main Vac valve closed
7/17/2010	4:41:18 PM	Bypass valve closed
7/17/2010	4:41:18 PM	Bubbler valve closed
7/17/2010	4:41:18 PM	Helium MFC set to  0.000000
7/17/2010	4:41:18 PM	H2 MFC set to  0.000000
7/17/2010	4:41:18 PM	BCl3 MFC set to  0.000000
7/17/2010	4:41:18 PM	PHl3 MFC set to  0.000000
7/17/2010	4:41:18 PM	SiCl4 MFC set to  0.000000
7/17/2010	4:41:18 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	4:41:18 PM	Tube furnace set to 0
7/17/2010	4:41:19 PM	Run finished at 4:41 PM
7/17/2010	4:43:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/17/2010	4:43:11 PM	Recipe started at 4:43 PM
7/17/2010	4:43:11 PM	Helium valve closed
7/17/2010	4:43:11 PM	H2 valve closed
7/17/2010	4:43:11 PM	BCl3 valve closed
7/17/2010	4:43:11 PM	PH3 valve closed
7/17/2010	4:43:11 PM	SiCl4 pre valve closed
7/17/2010	4:43:11 PM	SiCl4 post valve closed
7/17/2010	4:43:11 PM	Main Vac valve closed
7/17/2010	4:43:11 PM	Bubbler valve closed
7/17/2010	4:43:11 PM	Bypass valve opened
7/17/2010	4:43:11 PM	Helium MFC set to  0.000000
7/17/2010	4:43:11 PM	H2 MFC set to  0.000000
7/17/2010	4:43:11 PM	BCl3 MFC set to  0.000000
7/17/2010	4:43:11 PM	PHl3 MFC set to  0.000000
7/17/2010	4:43:11 PM	SiCl4 MFC set to  0.000000
7/17/2010	4:43:11 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	4:43:12 PM	Tube furnace set to 0
7/17/2010	4:43:46 PM	Helium valve closed
7/17/2010	4:43:46 PM	H2 valve closed
7/17/2010	4:43:46 PM	BCl3 valve closed
7/17/2010	4:43:46 PM	PH3 valve closed
7/17/2010	4:43:46 PM	SiCl4 pre valve closed
7/17/2010	4:43:46 PM	SiCl4 post valve closed
7/17/2010	4:43:46 PM	Bubbler valve closed
7/17/2010	4:43:46 PM	Main Vac valve opened
7/17/2010	4:43:46 PM	Bypass valve opened
7/17/2010	4:43:46 PM	Helium MFC set to  0.000000
7/17/2010	4:43:46 PM	H2 MFC set to  0.000000
7/17/2010	4:43:46 PM	BCl3 MFC set to  0.000000
7/17/2010	4:43:46 PM	PHl3 MFC set to  0.000000
7/17/2010	4:43:46 PM	SiCl4 MFC set to  0.000000
7/17/2010	4:43:46 PM	Bypass solenoid MFC set to  0.000000
7/17/2010	4:43:46 PM	Tube furnace set to 0
7/17/2010	4:43:47 PM	Run finished at 4:43 PM
7/17/2010	4:43:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
